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Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopyApplied Surface Science, 2007, 254, pp.1986-1992
Journal articles
ujm-00335240v1
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Investigation of laser ablation on hybrid sol-gel material applied to the field of microoptics14th International Sol-Gel Conference, Sep 2007, Montpellier, France
Conference papers
ujm-02060335v1
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Investigation of laser ablation on hybrid sol–gel material applied to kinoform etchingApplied physics. A, Materials science & processing, 2008, A92, pp.351-356
Journal articles
ujm-00290807v1
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Multi-level diffractive optical elements produced by excimer laser ablation of sol-gelOptics Express, 2008, 16 (18), pp.14044-14056
Journal articles
ujm-00334979v1
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