@article{leharzic:ujm-00118365, TITLE = {{Heat effected zone in micro drilling of metals by femtosecond laser pulses}}, AUTHOR = {Le Harzic, Ronan and Huot, Nicolas and Jonin, Christian and Audouard, Eric and Laporte, Pierre}, URL = {https://ujm.hal.science/ujm-00118365}, JOURNAL = {{Proceedings SPIE}}, NUMBER = {4760}, PAGES = {973-979}, YEAR = {2002}, HAL_ID = {ujm-00118365}, HAL_VERSION = {v1}, }