@patent{jaffrezicrenault:ujm-00664571, TITLE = {{Proc{\'e}d{\'e} de fabrication de microcellules {\'e}lectrochimiques planaires}}, AUTHOR = {Jaffrezic-Renault, N. and Sbartai, A. and Errachid, A. and Renaud, L. and Namour, Ph. and Loir, A.-S. and Garrelie, Florence and Donnet, C. and Soder, Herv{\'e} and Audouard, Eric and Granier, J.}, URL = {https://ujm.hal.science/ujm-00664571}, NUMBER = {N{\textdegree} FR2986225}, ADDRESS = {France}, YEAR = {2012}, MONTH = Jan, HAL_ID = {ujm-00664571}, HAL_VERSION = {v1}, }