@inproceedings{gate:ujm-00699339, TITLE = {{New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.}}, AUTHOR = {G{\^a}t{\'e}, V. and Jourlin, Y. and Langlet, Michel and Vocanson, Francis and Bernaud, G{\'e}rard and Veillas, C. and Cazier, A. and Dellea, O.}, URL = {https://ujm.hal.science/ujm-00699339}, BOOKTITLE = {{E-MRS 2012 Spring Meeting symposium V, Laser materials processing for micro and nano applications}}, ADDRESS = {Strasbourg, France}, YEAR = {2012}, MONTH = May, HAL_ID = {ujm-00699339}, HAL_VERSION = {v1}, }