@inproceedings{jourlin:ujm-00749646, TITLE = {{Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder}}, AUTHOR = {Jourlin, Yves and Tonchev, S. and Veillas, C. and Parriaux, O. and Laukkanen, J.}, URL = {https://ujm.hal.science/ujm-00749646}, BOOKTITLE = {{38th International Conference on Micro and Nano Engineering}}, ADDRESS = {Toulouse, France}, PAGES = {--}, YEAR = {2012}, MONTH = Sep, HAL_ID = {ujm-00749646}, HAL_VERSION = {v1}, }