%0 Conference Proceedings %T Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder %+ Laboratoire Hubert Curien (LHC) %+ University of Eastern Finland %A Jourlin, Yves %A Tonchev, S. %A Veillas, C. %A Parriaux, O. %A Laukkanen, J. %< avec comité de lecture %( Micro and Nano Engineering %B 38th International Conference on Micro and Nano Engineering %C Toulouse, France %P -- %8 2012-09-16 %D 2012 %Z Physics [physics]/Physics [physics]/Optics [physics.optics]Conference papers %G English %L ujm-00749646 %U https://ujm.hal.science/ujm-00749646 %~ UNIV-ST-ETIENNE %~ IOGS %~ CNRS %~ LAHC %~ PARISTECH %~ UDL