Frequency characterization of thin soft magnetic material layers used in spiral inductors,
Résumé
The paperdetailsthecharacterizationofthinmagneticmaterialslayers,particularlysoftmaterials, with respecttotheirbehaviourinfrequency(from10MHzto1GHz).Theproposedmethodissuitable for anysoftbutinsulatingmagneticmaterial;YttriumIronGarnet(YIG)isusedasanexample.The principleisbasedonacomparisonbetweensimulationsfordifferentvaluesofthepermeabilityand measurementvaluesversusfrequencyofplanarinductorstructures;anexperimentalvalidationis proposedaswell.ThinmagneticmaterialisfirstdepositedonanaluminasubstrateusingRFsputtering technique;aplanarspiralwindingofcopperisthendepositedonthemagneticmaterialbythesame technique.Theeffectivepermeabilityversusfrequencyisobtainedbycomparingtwosamplesofspiral windingswithandwithoutmagneticmaterial.Networkanalysermeasurementsonsamplesofvarious geometricaldimensionsandofdifferentthicknessesarenecessarytodeterminetheeffectivemagnetic permeability;wehaveobtainedarelativeeffectivepermeabilityofabout30forseventurnsspiral inductorofa17 mm YIGfilm.