<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of ujm-01185894</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-24T07:44:56+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Investigations of MGy ionizing dose effects induced in thin oxides of micro-electronic devices</title>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Gaillardin</surname>
              </persName>
              <email type="md5">2dbb2de0b5a470b84d4efa3e9be1e35d</email>
              <email type="domain">cea.fr</email>
              <idno type="idhal" notation="numeric">951922</idno>
              <idno type="halauthorid" notation="string">401373-951922</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Vincent</forename>
                <surname>Goiffon</surname>
              </persName>
              <idno type="halauthorid">728997-0</idno>
              <affiliation ref="#struct-82720"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Philippe</forename>
                <surname>Paillet</surname>
              </persName>
              <email type="md5">ab76ee833343c8303a8928381cd99a0f</email>
              <email type="domain">cea.fr</email>
              <idno type="idhal" notation="numeric">1223287</idno>
              <idno type="halauthorid" notation="string">293102-1223287</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-8701-7283</idno>
              <idno type="IDREF">https://www.idref.fr/156234165</idno>
              <idno type="VIAF">https://viaf.org/viaf/313535906</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Melanie</forename>
                <surname>Raine</surname>
              </persName>
              <idno type="halauthorid">600820-0</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Sylvain</forename>
                <surname>Girard</surname>
              </persName>
              <email type="md5">3c89b106c2192ddd557d9874f12e7ae0</email>
              <email type="domain">univ-st-etienne.fr</email>
              <idno type="idhal" notation="string">sylvain-girard-ujm</idno>
              <idno type="idhal" notation="numeric">4880</idno>
              <idno type="halauthorid" notation="string">16791-4880</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9804-8971</idno>
              <idno type="IDREF">https://www.idref.fr/076444899</idno>
              <affiliation ref="#struct-17835"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jean-Luc</forename>
                <surname>Leray</surname>
              </persName>
              <idno type="halauthorid">293101-0</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">P.</forename>
                <surname>Magnan</surname>
              </persName>
              <idno type="halauthorid">669233-0</idno>
              <affiliation ref="#struct-82720"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Youcef</forename>
                <surname>Ouerdane</surname>
              </persName>
              <email type="md5">f5a206aaae1d8480e3a27d4e7cfef387</email>
              <email type="domain">univ-st-etienne.fr</email>
              <idno type="idhal" notation="string">youcef-ouerdane</idno>
              <idno type="idhal" notation="numeric">13933</idno>
              <idno type="halauthorid" notation="string">2532909-13933</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-7210-0014</idno>
              <idno type="IDREF">https://www.idref.fr/03145772X</idno>
              <affiliation ref="#struct-17835"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Aziz</forename>
                <surname>Boukenter</surname>
              </persName>
              <email type="md5">5580ae67ae8f1e5e1c76e93525d6f6e6</email>
              <email type="domain">univ-st-etienne.fr</email>
              <idno type="idhal" notation="string">boukente</idno>
              <idno type="idhal" notation="numeric">17979</idno>
              <idno type="halauthorid" notation="string">2919-17979</idno>
              <idno type="ORCID">https://orcid.org/0000-0001-9850-5389</idno>
              <idno type="IDREF">https://www.idref.fr/033547637</idno>
              <affiliation ref="#struct-17835"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Martial</forename>
                <surname>Martinez</surname>
              </persName>
              <idno type="halauthorid">931630-0</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Claude</forename>
                <surname>Marcandella</surname>
              </persName>
              <idno type="halauthorid">376250-0</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Duhamel</forename>
                <surname>Olivier</surname>
              </persName>
              <email type="md5">d8ecd580e5133887ab4f7afe22ce2739</email>
              <email type="domain">CEA.FR</email>
              <idno type="idhal" notation="numeric">1057943</idno>
              <idno type="halauthorid" notation="string">879662-1057943</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Nicolas</forename>
                <surname>Richard</surname>
              </persName>
              <idno type="halauthorid">24124-0</idno>
              <affiliation ref="#struct-119523"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Sylvain</forename>
                <surname>Girard</surname>
              </persName>
              <email type="md5">3c89b106c2192ddd557d9874f12e7ae0</email>
              <email type="domain">univ-st-etienne.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2015-08-21 22:47:58</date>
              <date type="whenModified">2026-04-23 14:50:05</date>
              <date type="whenReleased">2015-08-21 22:47:58</date>
              <date type="whenProduced">2015-04-20</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="179029">
                <persName>
                  <forename>Sylvain</forename>
                  <surname>Girard</surname>
                </persName>
                <email type="md5">3c89b106c2192ddd557d9874f12e7ae0</email>
                <email type="domain">univ-st-etienne.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">ujm-01185894</idno>
            <idno type="halUri">https://ujm.hal.science/ujm-01185894</idno>
            <idno type="halBibtex">gaillardin:ujm-01185894</idno>
            <idno type="halRefHtml">&lt;i&gt;Advancements in Nuclear Instrumentation Measurement Methods and their Applications (ANIMMA 2015)&lt;/i&gt;, IEEE, Apr 2015, Lisbonne, Portugal</idno>
            <idno type="halRef">Advancements in Nuclear Instrumentation Measurement Methods and their Applications (ANIMMA 2015), IEEE, Apr 2015, Lisbonne, Portugal</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-ST-ETIENNE">Université Jean Monnet - Saint-Etienne</idno>
            <idno type="stamp" n="CEA">CEA - Commissariat à l'énergie atomique</idno>
            <idno type="stamp" n="IOGS" corresp="PARISTECH">Institut d'Optique Graduate School</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="PARISTECH">ParisTech</idno>
            <idno type="stamp" n="DAM" corresp="CEA">Direction des applications militaires</idno>
            <idno type="stamp" n="UDL">UDL</idno>
            <idno type="stamp" n="LABORATOIRE-HUBERT-CURIEN" corresp="UNIV-ST-ETIENNE">LAboratoire Hubert Curien</idno>
            <idno type="stamp" n="ISAE-SUPAERO">Institut Supérieur de l'Aéronautique et de l'Espace</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="0">No</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Investigations of MGy ionizing dose effects induced in thin oxides of micro-electronic devices</title>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Gaillardin</surname>
                  </persName>
                  <email type="md5">2dbb2de0b5a470b84d4efa3e9be1e35d</email>
                  <email type="domain">cea.fr</email>
                  <idno type="idhal" notation="numeric">951922</idno>
                  <idno type="halauthorid" notation="string">401373-951922</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Vincent</forename>
                    <surname>Goiffon</surname>
                  </persName>
                  <idno type="halauthorid">728997-0</idno>
                  <affiliation ref="#struct-82720"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Philippe</forename>
                    <surname>Paillet</surname>
                  </persName>
                  <email type="md5">ab76ee833343c8303a8928381cd99a0f</email>
                  <email type="domain">cea.fr</email>
                  <idno type="idhal" notation="numeric">1223287</idno>
                  <idno type="halauthorid" notation="string">293102-1223287</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-8701-7283</idno>
                  <idno type="IDREF">https://www.idref.fr/156234165</idno>
                  <idno type="VIAF">https://viaf.org/viaf/313535906</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Melanie</forename>
                    <surname>Raine</surname>
                  </persName>
                  <idno type="halauthorid">600820-0</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Sylvain</forename>
                    <surname>Girard</surname>
                  </persName>
                  <email type="md5">3c89b106c2192ddd557d9874f12e7ae0</email>
                  <email type="domain">univ-st-etienne.fr</email>
                  <idno type="idhal" notation="string">sylvain-girard-ujm</idno>
                  <idno type="idhal" notation="numeric">4880</idno>
                  <idno type="halauthorid" notation="string">16791-4880</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9804-8971</idno>
                  <idno type="IDREF">https://www.idref.fr/076444899</idno>
                  <affiliation ref="#struct-17835"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jean-Luc</forename>
                    <surname>Leray</surname>
                  </persName>
                  <idno type="halauthorid">293101-0</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">P.</forename>
                    <surname>Magnan</surname>
                  </persName>
                  <idno type="halauthorid">669233-0</idno>
                  <affiliation ref="#struct-82720"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Youcef</forename>
                    <surname>Ouerdane</surname>
                  </persName>
                  <email type="md5">f5a206aaae1d8480e3a27d4e7cfef387</email>
                  <email type="domain">univ-st-etienne.fr</email>
                  <idno type="idhal" notation="string">youcef-ouerdane</idno>
                  <idno type="idhal" notation="numeric">13933</idno>
                  <idno type="halauthorid" notation="string">2532909-13933</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-7210-0014</idno>
                  <idno type="IDREF">https://www.idref.fr/03145772X</idno>
                  <affiliation ref="#struct-17835"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Aziz</forename>
                    <surname>Boukenter</surname>
                  </persName>
                  <email type="md5">5580ae67ae8f1e5e1c76e93525d6f6e6</email>
                  <email type="domain">univ-st-etienne.fr</email>
                  <idno type="idhal" notation="string">boukente</idno>
                  <idno type="idhal" notation="numeric">17979</idno>
                  <idno type="halauthorid" notation="string">2919-17979</idno>
                  <idno type="ORCID">https://orcid.org/0000-0001-9850-5389</idno>
                  <idno type="IDREF">https://www.idref.fr/033547637</idno>
                  <affiliation ref="#struct-17835"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Martial</forename>
                    <surname>Martinez</surname>
                  </persName>
                  <idno type="halauthorid">931630-0</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Claude</forename>
                    <surname>Marcandella</surname>
                  </persName>
                  <idno type="halauthorid">376250-0</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Duhamel</forename>
                    <surname>Olivier</surname>
                  </persName>
                  <email type="md5">d8ecd580e5133887ab4f7afe22ce2739</email>
                  <email type="domain">CEA.FR</email>
                  <idno type="idhal" notation="numeric">1057943</idno>
                  <idno type="halauthorid" notation="string">879662-1057943</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Nicolas</forename>
                    <surname>Richard</surname>
                  </persName>
                  <idno type="halauthorid">24124-0</idno>
                  <affiliation ref="#struct-119523"/>
                </author>
              </analytic>
              <monogr>
                <meeting>
                  <title>Advancements in Nuclear Instrumentation Measurement Methods and their Applications (ANIMMA 2015)</title>
                  <date type="start">2015-04-20</date>
                  <date type="end">2015-04-24</date>
                  <settlement>Lisbonne</settlement>
                  <country key="PT">Portugal</country>
                </meeting>
                <respStmt>
                  <resp>conferenceOrganizer</resp>
                  <name>IEEE</name>
                </respStmt>
                <imprint/>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="spi.opti">Engineering Sciences [physics]/Optics / Photonic</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Total ionizing dose (TID) effects are studied for a long time in micro-electronic components designed to operate in natural and artificial environments. In most cases, TID induces both charge trapping in the bulk of irradiated oxides and the buildup of interface traps located at semiconductor/dielectric interfaces. Such effects result from basic mechanisms driven by both the shape of the electric field which stands into the oxide and of its fabrication process parameters which define pre-existing traps in the oxide’s bulk. From the pioneering studies based on “thick” oxides technologies to the most recent ones dedicated to innovative technologies, most of them concluded that the impact of total ionizingdose effects reduces with thinning the oxides. This is specifically the case for the gate-oxide of Metal-Oxide-Semiconductor Field Effect Transistors (MOSFET) for which it is generally considered that TID is not anymore a major issue at kGy dose ranges. TID effects are now mainly due to charge trapping in the field oxides such as Shallow Trench Isolation. This leads to create either parasitic conduction paths or to Radiation-Induced Narrow Channel Effects (RINCE). Static current-voltage (I-V) electrical characteristics are then modified through a significant increase of the off-current of NMOS transistors or by shifting the whole I-V curves (of both NMOS and PMOS transistors) respectively. Based on these assumptions, no significant shift of I-V curves should be observed in modern bulk CMOS technologies.However, this paper presents evidences of large threshold voltage shifts measured at MGy dose levels despite the fact that transistors are designed in a submicron bulk technology which features a 7-nm thin gate-oxide. These electrical shifts are encountered on PMOS transistors of different widths, WNARROW = 0.24 μm and WWIDE = 10 μm. The devices are irradiated using 10 keV X-rays at several total dose steps up to 3 MGy. On the one hand, negative threshold voltage shifts of more than 3.3 V are extracted after 3 MGy on narrow transistors. Even very high, this voltage shift is consistent with RINCE in narrow open layout transistors. On the other hand, voltage shifts greater than 2.5 V are extracted on wide transistors. Obviously, this result should not be associated neither to positive charge trapping in the thin gate oxide nor to any RINCE in this very wide transistor geometry.The final paper will thus provide an extensive study of this effect using other device designs and geometries tested with dedicated TID experiments to discuss whether or not this effect revealed at very high TID, i.e. several MGy, may be attributed to an enhanced high-TID induced charge trappingmechanism in thin gate oxides.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="laboratory" xml:id="struct-119523" status="VALID">
          <orgName>DAM Île-de-France</orgName>
          <orgName type="acronym">DAM/DIF</orgName>
          <desc>
            <address>
              <addrLine>CEA Bruyères-le-Châtel 91297 Arpajon cedex</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation name="DAM/DIF" active="#struct-5981" type="direct"/>
            <relation name="DAM" active="#struct-300016" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-82720" status="VALID">
          <idno type="ROR">https://ror.org/04gyj6s21</idno>
          <orgName>Institut Supérieur de l'Aéronautique et de l'Espace</orgName>
          <orgName type="acronym">ISAE-SUPAERO</orgName>
          <desc>
            <address>
              <addrLine>ISAE - 10 av. Edouard Belin - BP 54032 - 31055 TOULOUSE Cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.isae-supaero.fr/fr/</ref>
          </desc>
        </org>
        <org type="laboratory" xml:id="struct-17835" status="VALID">
          <idno type="IdRef">164609741</idno>
          <idno type="ISNI">0000 0000 9955 0977</idno>
          <idno type="RNSR">199511960B</idno>
          <idno type="ROR">https://ror.org/0028p8r67</idno>
          <orgName>Laboratoire Hubert Curien</orgName>
          <orgName type="acronym">LabHC</orgName>
          <date type="start">2006-01-01</date>
          <desc>
            <address>
              <addrLine>Bâtiment F 18 Rue du Professeur Benoît Lauras42000 Saint-Etienne</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://laboratoirehubertcurien.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-300036" type="direct"/>
            <relation active="#struct-300284" type="direct"/>
            <relation active="#struct-1327915" type="indirect"/>
            <relation name="UMR5516" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-5981" status="VALID">
          <idno type="IdRef">026372096</idno>
          <idno type="ISNI">0000000119569481</idno>
          <idno type="ROR">https://ror.org/00kn4eb29</idno>
          <idno type="Wikidata">Q2931222</idno>
          <orgName>Direction des Applications Militaires</orgName>
          <orgName type="acronym">DAM</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">http://www-dam.cea.fr/</ref>
          </desc>
          <listRelation>
            <relation name="DAM" active="#struct-300016" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-300016" status="VALID">
          <idno type="IdRef">026372061</idno>
          <idno type="ISNI">0000000122998025</idno>
          <idno type="ROR">https://ror.org/00jjx8s55</idno>
          <idno type="Wikidata">Q868550</idno>
          <orgName>Commissariat à l'énergie atomique et aux énergies alternatives</orgName>
          <orgName type="acronym">CEA</orgName>
          <desc>
            <address>
              <addrLine>Centre de SaclayCentre de GrenobleCentre de Cadaracheetc</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cea.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300036" status="VALID">
          <idno type="IdRef">110047702</idno>
          <orgName>Institut d'Optique Graduate School</orgName>
          <orgName type="acronym">IOGS</orgName>
          <desc>
            <address>
              <addrLine>2 avenue Augustin Fresnel, 91127 Palaiseau Cedex</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.institutoptique.fr</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300284" status="VALID">
          <idno type="IdRef">028209966</idno>
          <idno type="ISNI">0000 0001 2158 1682</idno>
          <idno type="ROR">https://ror.org/04yznqr36</idno>
          <idno type="Wikidata">Q623154</idno>
          <orgName>Université Jean Monnet - Saint-Étienne</orgName>
          <orgName type="acronym">UJM</orgName>
          <date type="start">1969-03-27</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>10, Rue Tréfilerie – CS 8230142023 Saint-Étienne Cedex 2</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-st-etienne.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-1327915" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-1327915" status="VALID">
          <idno type="IdRef">285395831</idno>
          <orgName>Université Jean Monnet (EPSCPE)</orgName>
          <orgName type="acronym">UJM EPE</orgName>
          <date type="start">2025-01-01</date>
          <desc>
            <address>
              <addrLine>10 rue Tréfilerie42100 Saint-Etienne</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-st-etienne.fr/fr/index.html</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>