@article{gate:ujm-01514970, TITLE = {{Dynamic Interferometry Lithography on a TiO2 Photoresist Sol-Gel for Diffracting Deflector Module}}, AUTHOR = {G{\^a}t{\'e}, Valentin and Berthod, Loic and Langlet, Michel and Vocanson, Francis and Verrier, Isabelle and Veillas, C and Kaminski-Cachopo, Anne and Parriaux, Olivier and Jourlin, Y.}, URL = {https://ujm.hal.science/ujm-01514970}, JOURNAL = {{Journal of Nanomaterials}}, HAL_LOCAL_REFERENCE = {CMNE}, PUBLISHER = {{Hindawi Publishing Corporation}}, VOLUME = {2017}, PAGES = {ID 8548041}, YEAR = {2017}, DOI = {10.1155/2017/8548041}, PDF = {https://ujm.hal.science/ujm-01514970/file/Journal%20of%20Nanomaterials.pdf}, HAL_ID = {ujm-01514970}, HAL_VERSION = {v1}, }