Direct UV micro-structuring process of dielectric TiO2 and metallic TiOxNy from sol-gel layers - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2018
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ujm-01919794 , version 1 (12-11-2018)

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  • HAL Id : ujm-01919794 , version 1

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Francis Vocanson, N Crespo-Monteiro, Michel Langlet, Loic Berthod, Olivier Dellea, et al.. Direct UV micro-structuring process of dielectric TiO2 and metallic TiOxNy from sol-gel layers. E-MRS 2018, Spring Meeting, symposium P, Solution processing and properties of functional oxide thin films and nanostructures III, Jun 2018, Strasbourg, France. ⟨ujm-01919794⟩
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