Conference Papers
Year : 2018
Francis VOCANSON : Connect in order to contact the contributor
https://ujm.hal.science/ujm-01919794
Submitted on : Monday, November 12, 2018-5:03:48 PM
Last modification on : Thursday, November 16, 2023-10:13:54 AM
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- HAL Id : ujm-01919794 , version 1
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Francis Vocanson, N Crespo-Monteiro, Michel Langlet, Loic Berthod, Olivier Dellea, et al.. Direct UV micro-structuring process of dielectric TiO2 and metallic TiOxNy from sol-gel layers. E-MRS 2018, Spring Meeting, symposium P, Solution processing and properties of functional oxide thin films and nanostructures III, Jun 2018, Strasbourg, France. ⟨ujm-01919794⟩
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