Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles Applied optics Year : 2019

Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

No file

Dates and versions

ujm-02273103 , version 1 (28-08-2019)

Identifiers

Cite

Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard. Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology. Applied optics, 2019, 58 (22), pp.6118. ⟨10.1364/AO.58.006118⟩. ⟨ujm-02273103⟩
46 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More