TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN). - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2022

TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).

Arnaud Valour
  • Function : Author
  • PersonId : 776163
  • IdRef : 204788986
Nicolas Crespo-Monteiro
  • Function : Author
  • PersonId : 1084375
Francis Vocanson
D. Jamon
Stéphanie Reynaud
  • Function : Author
  • PersonId : 1099178
Christophe Donnet
M. Langlet
Yves Jourlin
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Dates and versions

ujm-03802605 , version 1 (06-10-2022)

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  • HAL Id : ujm-03802605 , version 1

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Arnaud Valour, Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, Francis Vocanson, D. Jamon, et al.. TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).. International Sol-Gel Conference Solgel 2022, Jul 2022, Lyon, France. ⟨ujm-03802605⟩
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