100 kHz diffraction-limited femtosecond laser machining - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles Applied Physcics B Year : 2005

100 kHz diffraction-limited femtosecond laser machining

Nicolas Sanner
Nicolas Huot
  • Function : Author
  • PersonId : 836921
Eric Audouard
  • Function : Author
  • PersonId : 836922
Pierre Laporte
  • Function : Author
  • PersonId : 958474

Abstract

We demonstrate active and adaptive wavefront correction of a 100 kHz amplified femtosecond laser chain, and investigate the subsequent improvement for micromachining applications. Thanks to a non-pixelated liquid crystal modulator, phase-front distorsions are decreased down to landa/15 peak-valley and landa/100 rms. Clean 1.7 µm diffraction-limited micro-holes are obtained, both on low-threshold metallic and high-threshold dielectric materials. This high beam quality femtosecond source enables diffraction-limited high-speed micromachining.
No file

Dates and versions

ujm-00118042 , version 1 (04-12-2006)

Identifiers

  • HAL Id : ujm-00118042 , version 1

Cite

Nicolas Sanner, Nicolas Huot, Eric Audouard, Christian Larat, Pierre Laporte, et al.. 100 kHz diffraction-limited femtosecond laser machining. Applied Physcics B, 2005, 80, pp.27-30. ⟨ujm-00118042⟩
40 View
0 Download

Share

Gmail Facebook X LinkedIn More