Patterned photo-resist control by neural inversion of ellipsometric data - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2007
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ujm-00292101 , version 1 (30-06-2008)

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  • HAL Id : ujm-00292101 , version 1

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Issam Gereige, Stéphane Robert, M. Stchakovsky, Damien Jamon, Frederic Celle, et al.. Patterned photo-resist control by neural inversion of ellipsometric data. 4th International Conference on Spectroscopic Ellipsometry, Jun 2007, Stockholm, Sweden. pp.179. ⟨ujm-00292101⟩
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