Optimal architecture of a neural network for a high precision in ellipsometric scatterometry - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2007
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ujm-00365392 , version 1 (03-03-2009)

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Issam Gereige, Stéphane Robert, Gérard Granet. Optimal architecture of a neural network for a high precision in ellipsometric scatterometry. Instrumentation, Metrology, and Standards for Nanomanufacturing, Aug 2007, San Diego, United States. pp.66480G-1 - 66480G-11, ⟨10.1117/12.734278⟩. ⟨ujm-00365392⟩
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