NEMO EPIXNET grating phasemask for 50nm characteristic dimension
Yves Jourlin
(1)
,
Yannick Bourgin
(1)
,
Svetlen Tonchev
(1, 2, 3)
,
Colette Veillas
(1, 1)
,
Emilie Gamet
(1)
,
Olivier Parriaux
(1)
,
Anne Talneau
(4)
,
P. Karvinen
(5)
,
Nicolas Passilly
(6)
,
A. Md Zain
(7)
,
R.M. de La Rue
(7)
1
LHC -
Laboratoire Hubert Curien
2 ISSP - ISSP
3 ISSP - Institut of the Solid State Physics
4 LPN - Laboratoire de photonique et de nanostructures
5 JOE - University of Joensuu, Department of Physics and Mathematics
6 Department of Physics and Mathematics
7 Dpt of Electronics & Electrical Engineering
2 ISSP - ISSP
3 ISSP - Institut of the Solid State Physics
4 LPN - Laboratoire de photonique et de nanostructures
5 JOE - University of Joensuu, Department of Physics and Mathematics
6 Department of Physics and Mathematics
7 Dpt of Electronics & Electrical Engineering
Yves Jourlin
- Function : Author
- PersonId : 852214
- ORCID : 0000-0002-7935-2150
- IdRef : 060278218
Svetlen Tonchev
- Function : Author
Anne Talneau
- Function : Author
- PersonId : 741772
- IdHAL : anne-talneau
- ORCID : 0000-0001-9411-7944
- IdRef : 128009519
Nicolas Passilly
- Function : Author
- PersonId : 739135
- IdHAL : nicolas-passilly
- ORCID : 0000-0002-4447-4588
- IdRef : 099270870