Holographic exposure of subwavelength circular gratings using a cone based interferogram - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2012

Holographic exposure of subwavelength circular gratings using a cone based interferogram

Jean Sauvage-Vincent
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  • IdRef : 18078532X
Yves Jourlin
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ujm-00707404 , version 1 (12-06-2012)

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Jean Sauvage-Vincent, S. Tonchev, Yves Jourlin, O. Parriaux. Holographic exposure of subwavelength circular gratings using a cone based interferogram. SPIE Photonics Europe 2012, Belgique (2012), Apr 2012, France. pp.84280, ⟨10.1117/12.921863⟩. ⟨ujm-00707404⟩
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