Conference Papers
Year : 2011
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https://ujm.hal.science/ujm-00710933
Submitted on : Friday, June 22, 2012-9:07:34 AM
Last modification on : Friday, March 24, 2023-2:52:55 PM
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- HAL Id : ujm-00710933 , version 1
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S. Tonchev, Thomas Kampfe, O. Parriaux. Rehabilitation of wet etching for the low-cost manufacturing of highly selective subwavelength gratings of high efficiency,. 2nd EOS Conference on Manufacturing of Optical Components (EOSMOC), Munich, Germany (2011), May 2011, Germany. ⟨ujm-00710933⟩
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