Conference Papers
Year : 2012
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https://ujm.hal.science/ujm-00711014
Submitted on : Friday, June 22, 2012-11:02:03 AM
Last modification on : Friday, March 24, 2023-2:52:55 PM
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- HAL Id : ujm-00711014 , version 1
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S. Tonchev, O. Parriaux, Thomas Kampfe. Fabrication of (sub)wavelength resonant DOEs: a come-back of wet etching. 8th EOS Topical Meeting on Diffractive Optics 2012 (DO 2012), Feb 2012, Netherlands. ⟨ujm-00711014⟩
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