Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2012
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ujm-00735329 , version 1 (25-09-2012)

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  • HAL Id : ujm-00735329 , version 1

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Vanda Godinho, Damien Jamon, T. C. Rojas, J. Garcia-Lopez, Arnaud Fernandez. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. E-MRS 2012 SPRING MEETING, May 2012, Strasbourg, France. ⟨ujm-00735329⟩
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