Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2012
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ujm-00735361 , version 1 (25-09-2012)

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  • HAL Id : ujm-00735361 , version 1

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Vanda Godinho, J. Caballero-Hernandez, Damien Jamon, T. C. Rojas, R. Schierholz, et al.. Magnetron sputtered amorphous silicon films with closed porosity: microstructure and optical properties. European Conference on Nanofilms ECNF 2012, Jun 2012, Ancona, Italy. ⟨ujm-00735361⟩
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