Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles Optics Letters Year : 2012

Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography

No file

Dates and versions

ujm-00749634 , version 1 (07-11-2012)

Identifiers

  • HAL Id : ujm-00749634 , version 1

Cite

Fabrice Stehlin, Y. Bourgin, Arnaud Spangenberg, Yves Jourlin, O. Parriaux, et al.. Direct nanopatterning of 100 nm metal oxide periodic structures by Deep-UV immersion lithography. Optics Letters, 2012, 37 (22), pp.4651-4653. ⟨ujm-00749634⟩
42 View
0 Download

Share

Gmail Mastodon Facebook X LinkedIn More