Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2016

Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

Francis Vocanson
Damien Jamon
I. Verrier
Olivier Parriaux
  • Function : Author
  • PersonId : 861077
Yves Jourlin
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Dates and versions

ujm-01469405 , version 1 (16-02-2017)

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  • HAL Id : ujm-01469405 , version 1

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Loic Berthod, Valentin Gâté Gâté, Michel Langlet, Francis Vocanson, Carmen Jiménez, et al.. Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film. European Optical Society Annual Meeting (EOSAM), Sep 2016, VIENNE, Austria. ⟨ujm-01469405⟩
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