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Journal Articles Microelectronic Engineering Year : 2017

Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

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ujm-01514973 , version 1 (26-04-2017)

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  • HAL Id : ujm-01514973 , version 1

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Loic Berthod, O Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel. Microelectronic Engineering, 2017, 177, pp.46. ⟨ujm-01514973⟩
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