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Optical control of the homogeneity of a silicon grating

Stéphane Robert
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ujm-02060344 , version 1 (07-03-2019)

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  • HAL Id : ujm-02060344 , version 1

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Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩
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