Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles Applied physics. A, Materials science & processing Year : 2008

Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching

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ujm-00290807 , version 1 (26-06-2008)

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  • HAL Id : ujm-00290807 , version 1

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Estelle Neiss, Jean-Luc Rehspringer, Loïc Mager, Alain Fort, Joël Fontaine, et al.. Investigation of laser ablation on hybrid sol–gel material applied to kinoform etching. Applied physics. A, Materials science & processing, 2008, A92, pp.351-356. ⟨ujm-00290807⟩
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