Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy
Estelle Neiss
(1)
,
Manuel Flury
(2)
,
Philippe Gérard
(1)
,
Loïc Mager
(3)
,
Jean-Luc Rehspringer
(3)
,
Alain Fort
(3)
,
Paul Montgomery
(4)
,
Joël Fontaine
(1)
,
Thierry Engel
(1)
,
Abderrazzaq Benatmane
(4)
Manuel Flury
- Function : Author
- PersonId : 749517
- IdHAL : manuel-flury
- ORCID : 0000-0002-1878-884X
- IdRef : 07597827X
Loïc Mager
- Function : Author
- PersonId : 178597
- IdHAL : loic-mager
- ORCID : 0000-0001-9601-0024
- IdRef : 150567634
Paul Montgomery
- Function : Author
- PersonId : 740454
- IdHAL : paul-c-montgomery
- ORCID : 0000-0003-3060-6620
- IdRef : 071065229