Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy - Université Jean-Monnet-Saint-Étienne Access content directly
Journal Articles Applied Surface Science Year : 2007

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

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ujm-00335240 , version 1 (28-10-2008)

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  • HAL Id : ujm-00335240 , version 1

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Estelle Neiss, Manuel Flury, Philippe Gérard, Loïc Mager, Jean-Luc Rehspringer, et al.. Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy. Applied Surface Science, 2007, 254, pp.1986-1992. ⟨ujm-00335240⟩
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