Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder - Université Jean-Monnet-Saint-Étienne Access content directly
Conference Papers Year : 2012

Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder

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ujm-00749646 , version 1 (08-11-2012)

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  • HAL Id : ujm-00749646 , version 1

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Yves Jourlin, S. Tonchev, C. Veillas, O. Parriaux, J. Laukkanen. Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder. 38th International Conference on Micro and Nano Engineering, Sep 2012, Toulouse, France. ⟨ujm-00749646⟩
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