Conference Papers
Year : 2012
Yves Jourlin : Connect in order to contact the contributor
https://ujm.hal.science/ujm-00749646
Submitted on : Thursday, November 8, 2012-8:15:25 AM
Last modification on : Friday, March 24, 2023-2:52:56 PM
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- HAL Id : ujm-00749646 , version 1
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Yves Jourlin, S. Tonchev, C. Veillas, O. Parriaux, J. Laukkanen. Phase mask based cylindrical projection lithography for grating printing at the wall of a cylinder. 38th International Conference on Micro and Nano Engineering, Sep 2012, Toulouse, France. ⟨ujm-00749646⟩
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